Fabrication and measurement of traceable pitch standard with a big area at trans-scale

Author： Xiao Deng   Tong-Bao Li   Li-Hua Lei   Yan Ma   Rui Ma   Jun-Jing Weng   Yuan Li  

Publisher： IOP Publishing

ISSN： 1674-1056

Source： Chinese Physics B, Vol.23, Iss.9, 2014-09, pp. : 90601-90605

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