Achieving high thermal conductivity from AlN films deposited by high-power impulse magnetron sputtering

Author： Aissa K Ait   Semmar N   Achour A   Simon Q   Petit A   Camus J   Boulmer-Leborgne C   Djouadi M A  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.47, Iss.35, 2014-09, pp. : 355303-355309

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