VHF NEMS-CMOS piezoresistive resonators for advanced sensing applications

Author: Arcamone Julien   Dupré Cécilia   Arndt Grégory   Colinet Eric   Hentz Sébastien   Ollier Eric   Duraffourg Laurent  

Publisher: IOP Publishing

ISSN: 0957-4484

Source: Nanotechnology, Vol.25, Iss.43, 2014-10, pp. : 435501-435508

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