CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology

Author: Muñoz-Gamarra Jose Luis   Uranga Arantxa   Barniol Nuria  

Publisher: MDPI

E-ISSN: 2072-666x|7|2|30-30

ISSN: 2072-666x

Source: Micromachines, Vol.7, Iss.2, 2016-02, pp. : 30-30

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