Validation of a new facility at the Metrology Light Source for the calibration of radiation sources in the wavelength range from 116 nm to 400 nm

Author： Thornagel Reiner Klein Roman Kroth Simone Paustian Wolfgang Richter Mathias

Publisher： IOP Publishing

ISSN： 0026-1394

Source： Metrologia, Vol.51, Iss.5, 2014-10, pp. : 528-538

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