State-space modeling of the radio frequency inductively-coupled plasma generator

ISSN： 1742-6596

Source： Journal of Physics: Conference Series , Vol.208, Iss.1, 2010-02, pp. : 417-425

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Inductively-coupled dusty plasma

Le Journal de Physique IV, Vol. 10, Iss. PR5, 2000-03 ,pp. : Pr5-399-Pr5-402

Edp Sciences

Access to resources Recommend Favorite

Electron dynamics and frequency coupling in a radio-frequency capacitively biased planar coil inductively coupled plasma system

Plasma Sources Science and Technology, Vol. 24, Iss. 4, 2015-01 ,pp. : 44007-44014

IOP Publishing

Access to resources Recommend Favorite

Effects of capacitor termination to an antenna coil on the plasma parameters in a radio frequency inductively coupled plasma

By Han Duksun Lee Hyo-Chang Kim H J Chung Chin-Wook Chae Heesun

Plasma Sources Science and Technology, Vol. 22, Iss. 5, 2013-10 ,pp. : 55011-55016

IOP Publishing

Access to resources Recommend Favorite

Space and phase resolved optical emission in mode transitions of radio-frequency inductively coupled plasmas

Journal of Physics: Conference Series , Vol. 162, Iss. 1, 2009-04 ,pp. : 126-133

IOP Publishing

Access to resources Recommend Favorite

Nano-Crystalline Diamond Films Grown by Radio-Frequency Inductively Coupled Plasma Jet Enhanced Chemical Vapor Deposition

Chinese Physics Letters, Vol. 32, Iss. 8, 2015-01 ,pp. : 88104-88107

IOP Publishing

Access to resources Recommend Favorite