Effects of capacitor termination to an antenna coil on the plasma parameters in a radio frequency inductively coupled plasma

Author： Han Duksun   Lee Hyo-Chang   Kim H J     Chung Chin-Wook   Chae Heesun  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.22, Iss.5, 2013-10, pp. : 55011-55016

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