Electrothermomechanical modeling of out-of-plane deformation in single-stepped beams actuated by resistive heating

Author: Nieva Patricia M   Khajepour Amir   Nieva Patricia M  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|3|35028-35042

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.3, 2015-03, pp. : 35028-35042

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Abstract