A three-degree-of-freedom thin-film PZT-actuated microactuator with large out-of-plane displacement

Author： Choi Jongsoo   Qiu Zhen   Rhee Choong-Ho   Wang Thomas   Oldham Kenn  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.7, 2014-07, pp. : 75017-75029

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Fabrication and analysis of awl-shaped serpentine microsprings for large out-of-plane displacement

By Chou Hui-Min   Lin Meng-Ju   Chen Rongshun  

Journal of Micromechanics and Microengineering, Vol. 25, Iss. 9, 2015-09 ,pp. : 95018-95029

IOP Publishing

Access to resources Recommend Favorite

TEMPORARY PACKAGING OF PZT THIN-FILM MICROACTUATORS

By LEE CHENG-CHUN   HUME CLIFFORD   CAO G.Z.   (STEVE) SHEN I.Y.  

Integrated Ferroelectrics, Vol. 101, Iss. 1, 2008-01 ,pp. : 121-131

Taylor & Francis Ltd

Access to resources Recommend Favorite

A PIEZOELECTRICALLY ACTUATED MEMS SPEAKER WITH POLYIMIDE MEMBRANE AND THIN FILM Pb(Zr,Ti)O3(PZT) ACTUATOR

By CHO IL-JOO   JANG SEONGSOO   NAM HYO-JIN  

Integrated Ferroelectrics, Vol. 105, Iss. 1, 2009-01 ,pp. : 27-36

Taylor & Francis Ltd

Access to resources Recommend Favorite

A Wiener-Hopf approach to trade-offs between stability margin and performance in two- and three-degree-of-freedom multivariable control systems

By Bongiorno J. J.   Khorrami F.   Lin T. C.  

International Journal of Control, Vol. 68, Iss. 6, 1997-12 ,pp. : 1337-1366

Taylor & Francis Ltd

Access to resources Recommend Favorite

Development of a MEMS repulsive actuator for large out-of-plane force

By Khan Imran    

Journal of Micromechanics and Microengineering, Vol. 24, Iss. 3, 2014-03 ,pp. : 35022-35029

IOP Publishing

Access to resources Recommend Favorite