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Author: Wang Min Tsukamoto Takashiro Tanaka Shuji
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|3|35012-35019
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.3, 2015-03, pp. : 35012-35019
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