Author: Tsukamoto T Wang M Tanaka S
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|10|104011-104018
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 104011-104018
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Abstract
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