Hydrogen silsesquioxane mold coatings for improved replication of nanopatterns by injection molding

Author： Matschuk Maria Kafka Jan Pranov Henrik J Larsen Niels B Matschuk Maria

E-ISSN： 1361-6439|25|3|35018-35026

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.3, 2015-03, pp. : 35018-35026

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