A novel vertical comb-drive electrostatic actuator using a one layer process

By Hailu Zewdu   He Siyuan   Mrad Ridha Ben  

Journal of Micromechanics and Microengineering, Vol. 24, Iss. 11, 2014-11 ,pp. : 115016-115026

IOP Publishing

Access to resources Recommend Favorite

Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity

By Eltagoury Yomna M.   Soliman Mostafa   Sabry Yasser M.   Alotaibi Mohammed J.   Khalil Diaa  

Micromachines, Vol. 7, Iss. 10, 2016-10 ,pp. : 188-188

MDPI

Access to resources Recommend Favorite

Design and fabrication of a high-aspect-ratio parylene-based comb-drive actuator for large displacements at a low driving force

By Kuo Wen-Cheng   Chen Chen-Wei   Liu Chih-Ming  

Journal of Micromechanics and Microengineering, Vol. 23, Iss. 6, 2013-06 ,pp. : 65021-65027

IOP Publishing

Access to resources Recommend Favorite

Single mask, simple structure micro rotational motor driven by electrostatic comb-drive actuators

By       Sugiyama Susumu  

Journal of Micromechanics and Microengineering, Vol. 22, Iss. 1, 2012-01 ,pp. : 15008-15014

IOP Publishing

Access to resources Recommend Favorite

Large range dual-axis micro-stage driven by electrostatic comb-drive actuators

By Olfatnia Mohammad   Cui Leqing   Chopra Pankaj   Awtar Shorya  

Journal of Micromechanics and Microengineering, Vol. 23, Iss. 10, 2013-10 ,pp. : 105008-105018

IOP Publishing

Access to resources Recommend Favorite