Observation of nanoscale adhesion, friction and wear between ALD Al₂O₃ coated silicon MEMS sidewalls

Author： Buja Federico Fiorentino Giuseppe Kokorian Jaap Buja Federico

E-ISSN： 1361-6528|26|25|255701-255710

ISSN： 0957-4484

Source： Nanotechnology, Vol.26, Iss.25, 2015-06, pp. : 255701-255710

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