Single-crystal-silicon-based microinstrument to study friction and wear at MEMS sidewall interfaces

Author: Ansari N   Ashurst W R  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.22, Iss.2, 2012-02, pp. : 25008-25021

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