Author: Sun Bin Nogami Hirfoumi Pen Yao Sawada Renshi
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|7|75014-75021
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 75014-75021
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Abstract
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