Journal of Micromechanics and Microengineering,volume 25,issue 7  (07-2015)

Period of time: 2015年7期

Publisher: IOP Publishing

Founded in: 1991

Total resources: 42

E-ISSN: 1361-6439|25|7

ISSN: 0960-1317

Subject:

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Journal of Micromechanics and Microengineering,volume 25,issue 7

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Impact of sputter deposition parameters on molybdenum nitride thin film properties

By Stöber L,Konrath J P,Krivec S,Patocka F,Schwarz S,Bittner A,Schneider M,Schmid U in (2015)

Journal of Micromechanics and Microengineering,volume 25,issue 7 , Vol. 25, Iss. 7, 2015-07 , pp. 74001-74011 (11)

IOP Publishing

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2D stepping drive for hyperspectral systems

By Endrödy Csaba,Mehner Hannes,Grewe Adrian,Sinzinger Stefan,Hoffmann Martin in (2015)

Journal of Micromechanics and Microengineering,volume 25,issue 7 , Vol. 25, Iss. 7, 2015-07 , pp. 74002-74010 (9)

IOP Publishing

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Vertically etched silicon nano-rods as a sensitive electron detector

By Hajmirzaheydarali M,Akbari M,Soleimani-Amiri S,Sadeghipari M,Shahsafi A,Farahani A Akhavan,Mohajerzadeh S in (2015)

Journal of Micromechanics and Microengineering,volume 25,issue 7 , Vol. 25, Iss. 7, 2015-07 , pp. 74003-74008 (6)

IOP Publishing

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Modelling out-of-plane and in-plane resonant modes of microplates in liquid media

By Ruiz-Díez V,Hernando-García J,Manzaneque T,Kucera M,Schmid U,Sánchez-Rojas J L in (2015)

Journal of Micromechanics and Microengineering,volume 25,issue 7 , Vol. 25, Iss. 7, 2015-07 , pp. 74005-74013 (9)

IOP Publishing

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