

Period of time: 2015年7期
Publisher: IOP Publishing
Founded in: 1991
Total resources: 42
E-ISSN: 1361-6439|25|7
ISSN: 0960-1317
Subject:
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Journal of Micromechanics and Microengineering,volume 25,issue 7
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The 25th MicroMechanics Europe Workshop
Journal of Micromechanics and Microengineering,volume 25,issue 7 , Vol. 25, Iss. 7, 2015-07 , pp.
Impact of sputter deposition parameters on molybdenum nitride thin film properties
By Stöber L,Konrath J P,Krivec S,Patocka F,Schwarz S,Bittner A,Schneider M,Schmid U in (2015)
Journal of Micromechanics and Microengineering,volume 25,issue 7 , Vol. 25, Iss. 7, 2015-07 , pp.
2D stepping drive for hyperspectral systems
By Endrödy Csaba,Mehner Hannes,Grewe Adrian,Sinzinger Stefan,Hoffmann Martin in (2015)
Journal of Micromechanics and Microengineering,volume 25,issue 7 , Vol. 25, Iss. 7, 2015-07 , pp.
Vertically etched silicon nano-rods as a sensitive electron detector
By Hajmirzaheydarali M,Akbari M,Soleimani-Amiri S,Sadeghipari M,Shahsafi A,Farahani A Akhavan,Mohajerzadeh S in (2015)
Journal of Micromechanics and Microengineering,volume 25,issue 7 , Vol. 25, Iss. 7, 2015-07 , pp.
3D micro- and nano-machining of hydrogenated amorphous silicon films on SiO2/Si and glass substrates
By Soleimani-Amiri S,Zanganeh S,Ramzani R,Talei R,Mohajerzadeh S,Azimi S,Sanaee Z in (2015)
Journal of Micromechanics and Microengineering,volume 25,issue 7 , Vol. 25, Iss. 7, 2015-07 , pp.
Modelling out-of-plane and in-plane resonant modes of microplates in liquid media
By Ruiz-Díez V,Hernando-García J,Manzaneque T,Kucera M,Schmid U,Sánchez-Rojas J L in (2015)
Journal of Micromechanics and Microengineering,volume 25,issue 7 , Vol. 25, Iss. 7, 2015-07 , pp.
By Hotovy I,Kostic I,Nemec P,Predanocy M,Rehacek V in (2015)
Journal of Micromechanics and Microengineering,volume 25,issue 7 , Vol. 25, Iss. 7, 2015-07 , pp.
Flexible gastrointestinal motility pressure sensors based on aluminum thin-film strain-gauge arrays
By Silva L R,Sousa P J,Goncalves L M,Minas G in (2015)
Journal of Micromechanics and Microengineering,volume 25,issue 7 , Vol. 25, Iss. 7, 2015-07 , pp.
Treatment of TiO2 surface for deposition of gold nanoparticles from colloidal suspension
By Rehacek V,Hotovy I,Vojs M in (2015)
Journal of Micromechanics and Microengineering,volume 25,issue 7 , Vol. 25, Iss. 7, 2015-07 , pp.
Optical detection system for MEMS-type pressure sensor
By Sareło K,Górecka-Drzazga A,Dziuban J A in (2015)
Journal of Micromechanics and Microengineering,volume 25,issue 7 , Vol. 25, Iss. 7, 2015-07 , pp.