Dynamic performance analysis of a micro cantilever embedded in elastomer

Author: Hosono Minako   Noda Kentaro   Matsumoto Kiyoshi   Shimoyama Isao  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|7|75006-75013

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 75006-75013

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Abstract