Author: Kusaka Yasuyuki Nomura Ken-ichi Fukuda Nobuko Ushijima Hirobumi
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|5|55022-55030
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.5, 2015-05, pp. : 55022-55030
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Abstract