Author: Cong Hailin Xu Xiaodan Yu Bing Yuan Hua Peng Qiaohong Tian Chao
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|5|53001-53011
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.5, 2015-05, pp. : 53001-53011
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Abstract
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