Thin-film piezoelectric bimorph actuators with increased thickness using double Pb[Zr,Ti]O₃ layers

Author： Inoue Jun-Ichi Kanda Kensuke Fujita Takayuki Maenaka Kazusuke

E-ISSN： 1361-6439|25|5|55001-55012

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.5, 2015-05, pp. : 55001-55012

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