Flip-chip integration of Si bare dies on polymeric substrates at low temperature using ICA vias made in dry film photoresist

Author: Quintero Andrés Vásquez   Briand Danick   de Rooij Nico F  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|4|45013-45025

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.4, 2015-04, pp. : 45013-45025

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