Author： Ahn C.H. Park H.W. Kim H.H. Park S.H. Son C. Kim M.C. Lee J.H. Go J.S.
Publisher： IOP Publishing
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65031-65037
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