Nanoimprint lithography 20 years on

Author: Xia Qiangfei   Pease R Fabian  

Publisher: IOP Publishing

E-ISSN: 1361-6528|26|18|182501-182503

ISSN: 0957-4484

Source: Nanotechnology, Vol.26, Iss.18, 2015-05, pp. : 182501-182503

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Abstract