An analytical model of thermal mechanical stress induced by through silicon via

Author: Gang Dong   Tao Shi   Ying-Bo Zhao   Yin-Tang Yang  

Publisher: IOP Publishing

E-ISSN: 1741-4199|24|5|56601-56607

ISSN: 1674-1056

Source: Chinese Physics B, Vol.24, Iss.5, 2015-05, pp. : 56601-56607

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Abstract