Sustaining mechanism and spatial structure of high-density ring-shaped hollow cuspate magnetized rf plasma for low-pressure plasma processing

Author: Ohtsu Y   Yanagise T  

Publisher: IOP Publishing

E-ISSN: 1361-6595|24|3|34005-34013

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.24, Iss.3, 2015-06, pp. : 34005-34013

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Abstract