Electron bounce resonance heating in dual-frequency capacitively coupled oxygen discharges

By Liu Yong-Xin   Zhang Quan-Zhi   Liu Jia   Song Yuan-Hong   Bogaerts Annemie   Wang You-Nian  

Plasma Sources Science and Technology, Vol. 22, Iss. 2, 2013-04 ,pp. : 25012-25022

IOP Publishing

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Radio-frequency capacitively coupled plasmas in hydrogen excited by tailored voltage waveforms: comparison of simulations with experiments

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Plasma Sources Science and Technology, Vol. 23, Iss. 6, 2014-12 ,pp. : 65049-65059

IOP Publishing

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Simulation study of stochastic heating in single-frequency capacitively coupled discharges with critical evaluation of analytical models

By Sharma S.   Turner M.M.  

Plasma Sources Science and Technology, Vol. 22, Iss. 3, 2013-06 ,pp. : 35014-35025

IOP Publishing

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Equivalence of the hard-wall and kinetic-fluid models of collisionless electron heating in capacitively coupled discharges

By Lafleur T   Chabert P   Turner M M   Booth J P  

Plasma Sources Science and Technology, Vol. 23, Iss. 1, 2014-02 ,pp. : 15016-15026

IOP Publishing

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Collisionless sheath heating in current-driven capacitively coupled plasma discharges via higher order sinusoidal signals

By Sharma S   Mishra S K   Kaw P K   Das A   Sirse N   Turner M M  

Plasma Sources Science and Technology, Vol. 24, Iss. 2, 2015-04 ,pp. : 25037-25044

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