Studies of nanoindentation and residual stress analysis of Ge/GaAs epilayers

Author： Buffagni Elisa Deivasigamani Geetha Dakshanamoorthy Arivuoli Bosi Matteo Ferrari Claudio Attolini Giovanni Buffagni Elisa

Publisher： IOP Publishing

E-ISSN： 1361-6641|30|5|55004-55010

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.30, Iss.5, 2015-05, pp. : 55004-55010

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