Dopant species with Al–Si and N–Si bonding in the MOCVD of AlN implementing trimethylaluminum, ammonia and silane

Author: Santos R B dos   Rivelino R   Gueorguiev G K   Kakanakova-Georgieva A   Santos R B dos  

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|29|295104-295110

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.29, 2015-07, pp. : 295104-295110

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