Comment on 'Sheath model for dual-frequency capacitive discharges'

Author: Chen Wen-Cong   Pu Yi-Kang  

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|26|268001-268005

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.26, 2015-07, pp. : 268001-268005

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Abstract