Spectroscopic characterization of the plasma generated during the deposition of AlxGa1−xN films by pulsed laser co-ablation of Al and GaAs targets in electron cyclotron resonance nitrogen plasma

Author: Liang Peipei   Cai Hua   Li Yanli   Yang Xu   You Qinghu   Sun Jian   Xu Ning   Wu Jiada  

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|24|245203-245212

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.24, 2015-06, pp. : 245203-245212

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