Plasma Enhanced Chemical Vapor Deposition of Poly(2,2,3,4,4,4‐hexafluorobutyl acrylate) Thin Films

Publisher： John Wiley & Sons Inc

E-ISSN： 1521-3862|948-1907|7-8-9|188-195

ISSN： 0948-1907

Source： CHEMICAL VAPOR DEPOSITION (ELECTRONIC), Vol.948-1907, Iss.7-8-9, 2015-09, pp. : 188-195

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