Spectroscopic and Microscopic Investigations of Degradation Processes in Polymer Surface‐Near Regions During the Deposition of SiOx Films

Publisher： John Wiley & Sons Inc

E-ISSN： 1612-8869|12|9|1002-1009

ISSN： 1612-8850

Source： PLASMA PROCESSES AND POLYMERS (ELECTRONIC), Vol.12, Iss.9, 2015-09, pp. : 1002-1009

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