Syntheses and optical properties of low-temperature SiOx and TiOx thin films prepared by plasma enhanced CVD

Author: Song Y.   Sakurai T.   Kishimoto K.   Maruta K.   Matsumoto S.   Kikuchi K.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.51, Iss.4, 1998-12, pp. : 525-530

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