Determining sample alignment in x-ray reflectometry using thickness and density from GaAs/AlAs multilayer certified reference materials

Author： Windover D   Gil D L   Azuma Y   Fujimoto T  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.10, 2014-10, pp. : 105007-105014

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