X-ray-diffractometry of structural changes occurring in surface layers of silicon in the process of laser diffusion of boron

Author： Petrakov A. Golubev E.

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7834

Source： Physics of the Solid State, Vol.40, Iss.1, 1998-01, pp. : 140-143

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