Author: Korolev D. Kostyuk A. Belov A. Mikhaylov A. Dudin Yu. Bobrov A. Malekhonova N. Pavlov D. Tetelbaum D.
Publisher: MAIK Nauka/Interperiodica
ISSN: 1063-7834
Source: Physics of the Solid State, Vol.55, Iss.11, 2013-11, pp. : 2361-2367
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
By Timoshenko V. Shalygina O. Lisachenko M. Zhigunov D. Teterukov S. Kashkarov P. Kovalev D. Zacharias M. Imakita K. Fujii M.
Physics of the Solid State, Vol. 47, Iss. 1, 2005-01 ,pp. :
Effect of argon ion bombardment on amorphous silicon carbonitride films
Journal of Physics: Conference Series , Vol. 480, Iss. 1, 2014-04 ,pp. :