Apparatus for growing GaN films on large-area substrates by the method of chloride-hydride vapor-phase epitaxy

Author: Stepanov S.   Tsvetkov D.   Cherenkov A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.24, Iss.10, 1998-10, pp. : 813-815

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