The effect of ultrasonic treatment on the generation characteristics of a Si-SiO2 interface

Author: Parchinskii P.   Vlasov S.   Ligai L.   Shchukina O.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.29, Iss.5, 2003-05, pp. : 392-394

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