Effect of annealing temperature on the crystal phase fraction in silicon nanoclusters in a silicon oxide matrix

Author: Emel’yanov V.   Seminogov V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.32, Iss.12, 2006-12, pp. : 1051-1053

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