Modification of germanium nanoclusters in GeO x films during isochronous furnace and pulse laser annealing

Author: Marin D.   Volodin V.   Gorokhov E.   Shcheglov D.   Latyshev A.   Vergnat M.   Koch J.   Chichkov B.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.36, Iss.5, 2010-05, pp. : 439-442

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