Charge Loss Characteristics of Different Al Contents in a HfAlO Trapping Layer Investigated by Variable Temperature Kelvin Probe Force Microscopy

Author: Dong Zhang   Zong-Liang Huo   Lei Jin   Yu-Long Han   Yu-Qiong Chu   Guo-Xing Chen   Ming Liu   Bao-He Yang  

Publisher: IOP Publishing

ISSN: 0256-307X

Source: Chinese Physics Letters, Vol.31, Iss.6, 2014-06, pp. : 67701-67704

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