Solid-state reaction of nickel silicide and germanide contacts to semiconductor nanochannels

Author： Tang Wei   Nguyen Binh-Minh   Chen Renjie   Dayeh Shadi A  

Publisher： IOP Publishing

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.29, Iss.5, 2014-05, pp. : 54004-54021

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