Stimulated oxygen impurity gettering under ultra-shallow junction formation in silicon

Author： Oberemok O   Kladko V   Litovchenko V   Romanyuk B   Popov V   Melnik V   Sarikov A   Gudymenko O   Vanhellemont J  

Publisher： IOP Publishing

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.29, Iss.5, 2014-05, pp. : 55008-55014

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