Integration of a silicon-based microprobe into a gear measuring instrument for accurate measurement of micro gears

Author： Ferreira N   Krah T   Jeong D C   Metz D   Kniel K   Dietzel A   Büttgenbach S   Härtig F  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.6, 2014-06, pp. : 64016-64022

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