Low-Temperature Bonding for Silicon-Based Micro-Optical Systems

Author： Qin Yiheng   Howlader Matiar M.R.   Deen M. Jamal  

Publisher： MDPI

E-ISSN： 2304-6732|2|4|1164-1201

ISSN： 2304-6732

Source： Photonics, Vol.2, Iss.4, 2015-12, pp. : 1164-1201

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