Silicide induced ion beam patterning of Si(001)

Author: Engler Martin   Frost Frank   Müller Sven   Macko Sven   Will Moritz   Feder René   Spemann Daniel   Hübner René   Facsko Stefan   Michely Thomas  

Publisher: IOP Publishing

ISSN: 0957-4484

Source: Nanotechnology, Vol.25, Iss.11, 2014-03, pp. : 115303-115320

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