Secondary growth mechanism of SiGe islands deposited on a mixed-phase microcrystalline Si by ion beam co-sputtering

Author: Ke S Y   Yang J   Qiu F   Wang Z Q   Wang C   Yang Y  

Publisher: IOP Publishing

E-ISSN: 1361-6528|26|44|445602-445613

ISSN: 0957-4484

Source: Nanotechnology, Vol.26, Iss.44, 2015-11, pp. : 445602-445613

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