Fabrication of polymer nanowires via maskless O2 plasma etching

Author: Du Ke   Wathuthanthri Ishan   Liu Yuyang     Choi Chang-Hwan  

Publisher: IOP Publishing

ISSN: 0957-4484

Source: Nanotechnology, Vol.25, Iss.16, 2014-04, pp. : 165301-165310

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