Generation of 3D nanopatterns with smooth surfaces

Author: Waid Simon   Wanzenboeck Heinz D   Muehlberger Michael   Gavagnin Marco   Bertagnolli Emmerich  

Publisher: IOP Publishing

ISSN: 0957-4484

Source: Nanotechnology, Vol.25, Iss.31, 2014-08, pp. : 315302-315311

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